Publication: Hydrogen and humidity sensing based on WGMs of elastic polymer optical microresonators
| dc.contributor.authors | Eryürek M., Karadag Y., Anand S., Kilinç N., Kiraz A. | |
| dc.date.accessioned | 2022-03-28T15:05:38Z | |
| dc.date.accessioned | 2026-01-11T18:26:16Z | |
| dc.date.available | 2022-03-28T15:05:38Z | |
| dc.date.issued | 2015 | |
| dc.description.abstract | We report hydrogen and humidity sensor employing elastic polymer (SU-8) optical microresonators. The sensing mechanism relies on the optical whispering gallery mode (WGM) resonance shifts in the transmission spectra of these microresonators. WGMs are excited through SU-8 waveguides in which a tunable laser light is coupled from an optical fiber. Relative humidity between 0 and 65% is detected at room temperature. For hydrogen sensing, the microresonators are coated with a thin layer of palladium (Pd) metal layer to increase the sensing performance. Hydrogen gas is detected reversibly between 0.3 and 1.5%. Hydrogen gas concentrations higher than 1.5% result irreversible degradation of the devices because of a phase transition occurring in the Pd layer. | |
| dc.identifier.isbn | 9781934142301 | |
| dc.identifier.issn | 15599450 | |
| dc.identifier.uri | https://hdl.handle.net/11424/257095 | |
| dc.language.iso | eng | |
| dc.publisher | Electromagnetics Academy | |
| dc.relation.ispartof | Progress in Electromagnetics Research Symposium | |
| dc.rights | info:eu-repo/semantics/closedAccess | |
| dc.title | Hydrogen and humidity sensing based on WGMs of elastic polymer optical microresonators | |
| dc.type | conferenceObject | |
| dspace.entity.type | Publication | |
| oaire.citation.endPage | 895 | |
| oaire.citation.startPage | 892 | |
| oaire.citation.title | Progress in Electromagnetics Research Symposium | |
| oaire.citation.volume | 2015-January |