Investigation of Data Mining Processing Stage Effect on Performance in Interferometric Measurement System

Abstract

Interferometric measuring systems are frequently used in determining the precise changes. The light of the venture property is used in this system which is possible to perform measurements in the nanometer precision. Analysis of data, which are taken from interferometric measurement systems, can be performed by fringe counting, image processing. There are disadvantages of such kinds of methods which are cost, time and design challenge. The most innovation in our study, the need of electronic circuit or image processing algorithm for determining obtained values which are taken from measurement system as a result of processing part can be eliminated. In processing step, arrangement of the data is quite important in terms of the achieved results. Through data processing, it is provided to make faster analysis by the aid of increasing quantity of the data. The displacement values which are taken by data processing show 90% success when comparing them with both electronic and image processing techniques.