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Computational model for the nonlinear dynamic response of MEMS-based micromirror

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dc.contributor.authorERSOY, SEZGİN
dc.contributor.authorsErtuğrul İ., Ersoy S., Ragulskis M.
dc.date.accessioned2023-08-25T10:49:06Z
dc.date.available2023-08-25T10:49:06Z
dc.date.issued2022-08-25
dc.description.abstractIn this study, it is aimed to perform Finite Element Analysis (FEA) of micromirror based on Micro-Electro-Mechanical Systems (MEMS) and to examine the nonlinear and dynamic responses of this system. Micromirror devices are indispensable, especially for optical systems and form the basis of them. In this work, dynamic and nonlinear responses of micromirror with 4 symmetric arms and one reflective surface were investigated. During the design and modeling, it is assumed that the upper and lower layers of the reflective surface have equal tensile and compressive stresses. The analysis of the system was obtained by applying a force of up to 30 GPa Prestressed on the reflective surface. The design and FEA of the micromirror system were made with the Comsol Multiphysics program. The nonlinear response of the analysis was carried out with the MATLAB program. This model, which has the most basic design of micromirror structures used in optical systems, is thought to be a source for a good examination of the nonlinear dynamic model and for understanding more complex structures.
dc.identifier.citationErtuğrul İ., Ersoy S., Ragulskis M., \"Computational model for the nonlinear dynamic response of MEMS-based micromirror\", 58th International JVE Conference, Ventspils, Letonya, 25 - 26 Ağustos 2022, cilt.44, sa.22851, ss.149-155
dc.identifier.doi10.21595/vp.2022.22851
dc.identifier.endpage155
dc.identifier.startpage149
dc.identifier.urihttps://www.extrica.com/article/22851
dc.identifier.urihttps://hdl.handle.net/11424/292848
dc.language.isoeng
dc.relation.ispartof58th International JVE Conference
dc.rightsinfo:eu-repo/semantics/openAccess
dc.subjectMetalurji ve Malzeme Mühendisliği
dc.subjectMühendislik ve Teknoloji
dc.subjectMetallurgical and Materials Engineering
dc.subjectEngineering and Technology
dc.subjectMühendislik, Bilişim ve Teknoloji (ENG)
dc.subjectMalzeme Bilimi
dc.subjectMETALURJİ VE METALURJİ MÜHENDİSLİĞİ
dc.subjectEngineering, Computing & Technology (ENG)
dc.subjectMATERIALS SCIENCE
dc.subjectMETALLURGY & METALLURGICAL ENGINEERING
dc.subjectmems
dc.subjectmicromirror
dc.subjectdynamics response
dc.subjectnonlinear response
dc.subjectCOMSOL simulation
dc.titleComputational model for the nonlinear dynamic response of MEMS-based micromirror
dc.typeconferenceObject
dspace.entity.typePublication
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relation.isAuthorOfPublicationeea24e32-3704-4272-87de-e30b5c4e4c1e
relation.isAuthorOfPublication.latestForDiscoveryeea24e32-3704-4272-87de-e30b5c4e4c1e

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