Residual stress estimation of ceramic thin films by X-ray diffraction and indentation techniques

Abstract

The residual stresses in ceramic thin films obtained by the indentation method have been found to be three times higher than those of the X-ray diffraction method. This discrepancy can be eliminated by setting the geometrical factor for the Vickers pyramid indenter to 1 in the relevant equation of the indentation method. (C) 2003 Acta Materialia Inc. Published by Elsevier Science Ltd. All rights reserved.